The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Jan. 11, 2010
Denis Alexandrovich Glushkov, Witten, DE;
Vadim Yevgenyevich Banine, Deurne, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Nikolay Nikolaevitch Salashchenko, Nizhny Novgorod, RU;
Nikolay Ivanovich Chkhalo, Nizhny Novgorod, RU;
Denis Alexandrovich Glushkov, Witten, DE;
Vadim Yevgenyevich Banine, Deurne, NL;
Leonid Aizikovitch Sjmaenok, Vaals, NL;
Nikolay Nikolaevitch Salashchenko, Nizhny Novgorod, RU;
Nikolay Ivanovich Chkhalo, Nizhny Novgorod, RU;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A multilayer mirror to reflect radiation having a wavelength in the range of 2-8 nm has alternating layers. The alternating layers include a first layer and a second layer. The first and second layers are selected from the group consisting of: U and BC layers, Th and BC layers, La and BC layers, La and BC layers, U and BC layers, Th and BC layers, La and B layers, U and B layers, C and B layers, Th and B layers, U compound and BC layers, Th compound and BC layers, La compound and BC layers, La compound and BC layers, U compound and a BC layers, Th compound and a BC layers, La compound and a B layers, U compound and B layers, and Th compound and a B layers. An interlayer is disposed between at least one of the first layers and the second layer.