The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Jun. 09, 2011
Sven Antoin Johan Hol, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Wilhelmus Henricus Theodorus Maria Aangenent, 's-Hetogenbosch, NL;
George Wilhelmus Johannes Clijsen, Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Eindhoven, NL;
Jacob Kornelis Ter Veer, Eindhoven, NL;
Jeroen DE Boeij, Eindhoven, NL;
Sven Antoin Johan Hol, Eindhoven, NL;
Johannes Petrus Martinus Bernardus Vermeulen, Helmond, NL;
Wilhelmus Henricus Theodorus Maria Aangenent, 's-Hetogenbosch, NL;
George Wilhelmus Johannes Clijsen, Veldhoven, NL;
Johannes Antonius Gerardus Akkermans, Eindhoven, NL;
Jacob Kornelis Ter Veer, Eindhoven, NL;
Jeroen De Boeij, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A variable reluctance device includes first and second magnetic members, a coil, a measurement coil, and a control unit. The first and second magnetic members are displaceable relative to each other to provide a magnetic circuit having a variable reluctance. The coil for, in use, receiving a current for generating a magnetic flux through the magnetic circuit. The measurement coil for generating a measurement signal representative of the magnetic flux through the magnetic circuit, whereby the measurement coil is arranged to substantially enclose the magnetic flux through the magnetic circuit. The control unit arranged to receive the flux signal at an input terminal and, in response, provide a control signal based on the measurement signal at an output terminal for controlling an amplitude of the current or a force of a further device. The device can e.g., be applied in a stage apparatus or a lithographic apparatus.