The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 14, 2015
Filed:
Mar. 01, 2013
Applicant:
Jsr Corporation, Tokyo, JP;
Inventors:
Hisashi Nakagawa, Tokyo, JP;
Tatsuya Sakai, Tokyo, JP;
Assignee:
JSR CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
C09D 7/00 (2006.01); C04B 35/111 (2006.01); C04B 35/581 (2006.01); C04B 35/622 (2006.01); C23C 18/12 (2006.01); C23C 18/14 (2006.01); H01L 21/02 (2006.01); C09D 7/12 (2006.01);
U.S. Cl.
CPC ...
C09D 7/1233 (2013.01); C04B 35/111 (2013.01); C04B 35/581 (2013.01); C04B 35/62222 (2013.01); C09D 7/00 (2013.01); C23C 18/1204 (2013.01); C23C 18/125 (2013.01); C23C 18/1208 (2013.01); C23C 18/1216 (2013.01); C23C 18/1233 (2013.01); C23C 18/1241 (2013.01); C23C 18/1245 (2013.01); C23C 18/1275 (2013.01); C23C 18/1279 (2013.01); C23C 18/1283 (2013.01); C23C 18/14 (2013.01); H01L 21/0234 (2013.01); H01L 21/0254 (2013.01); H01L 21/02178 (2013.01); H01L 21/02282 (2013.01); H01L 21/02304 (2013.01); H01L 21/02337 (2013.01); H01L 21/02381 (2013.01); H01L 21/02422 (2013.01); H01L 21/02425 (2013.01); H01L 21/02538 (2013.01); H01L 21/02628 (2013.01); C04B 2235/48 (2013.01);
Abstract
A composition for forming an aluminum-containing film includes an organic solvent, and an organic aluminum compound. The organic aluminum compound has a structure represented by a general formula (1). In the general formula (1), each of Rto Ris independently a hydrogen atom or a hydrocarbon group, each of Rs, Rs, Rs, Rs, Rs and Rs is identical or different, and optionally each of Rs, Rs, Rs, Rs, Rs or Rs is linked to one another.