The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2015
Filed:
Jul. 11, 2013
Applicant:
Hermes Microvision Inc., Hsinchu, TW;
Inventors:
Assignee:
HERMES MICROVISION INC., Hsinchu, TW;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/28 (2013.01); H01J 2237/24435 (2013.01); H01J 2237/2444 (2013.01); H01J 2237/2449 (2013.01);
Abstract
This invention provides a design to process a large range of detection beam current at low noise with a single detector. With such a design, the detection system can generate up to 10gain and maximum signal output at more than mini Ampere (mA) level. A condenser lens is configured to increase bandwidth of the detector that scan speed can be enhanced.