The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2015
Filed:
Jul. 17, 2012
Applicants:
Taro Ikeda, Nirasaki, JP;
Yuki Osada, Nirasaki, JP;
Shigeru Kasai, Nirasaki, JP;
Inventors:
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); H05H 1/46 (2006.01); H01Q 15/00 (2006.01);
U.S. Cl.
CPC ...
H05H 1/46 (2013.01); H01J 37/32192 (2013.01); H01J 37/32211 (2013.01); H01J 37/3222 (2013.01); H01J 37/32229 (2013.01); H01Q 15/0006 (2013.01); H01J 37/32293 (2013.01); H01J 37/32311 (2013.01); H05H 2001/4622 (2013.01);
Abstract
An electromagnetic-radiation power-supply mechanism includes a microwave power introduction port provided on the side of the coaxial waveguide, a power line being connected to the microwave power introduction port; and a power supply antenna for radiating the electromagnetic wave power into the waveguide, the power supply antenna being connected to the power line. The power supply antenna includes an antenna body having a first pole connected to the power line and a second pole connected to an inner conductor of the waveguide; and a ring-shaped reflection portion extending from opposite sides of the antenna body.