The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 30, 2015

Filed:

Feb. 05, 2013
Applicants:

Michael Phenis, Markleville, IN (US);

Laurl Johnson, Greenfield, IN (US);

Raymond Chan, Westborough, MA (US);

Diane Scheele, Greenwood, IN (US);

Kimberly Pollard, Anderson, IN (US);

Inventors:

Michael Phenis, Markleville, IN (US);

Laurl Johnson, Greenfield, IN (US);

Raymond Chan, Westborough, MA (US);

Diane Scheele, Greenwood, IN (US);

Kimberly Pollard, Anderson, IN (US);

Assignee:

Dynaloy, LLC, Kingsport, TN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01); C11D 1/00 (2006.01); C11D 3/26 (2006.01); C11D 3/30 (2006.01); C11D 3/43 (2006.01); C11D 7/32 (2006.01); C11D 7/50 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/426 (2013.01); C11D 1/004 (2013.01); C11D 3/26 (2013.01); C11D 3/30 (2013.01); C11D 3/43 (2013.01); C11D 7/32 (2013.01); C11D 7/3218 (2013.01); C11D 7/5009 (2013.01); C11D 11/0047 (2013.01); G03F 7/425 (2013.01);
Abstract

Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, a secondary solvent, and less than about 3 wt. % water. Methods for the preparation and use of the improved dry stripping solutions are additionally provided.


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