The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 30, 2015
Filed:
Feb. 05, 2013
Michael Phenis, Markleville, IN (US);
Laurl Johnson, Greenfield, IN (US);
Raymond Chan, Westborough, MA (US);
Diane Scheele, Greenwood, IN (US);
Kimberly Pollard, Anderson, IN (US);
Michael Phenis, Markleville, IN (US);
Laurl Johnson, Greenfield, IN (US);
Raymond Chan, Westborough, MA (US);
Diane Scheele, Greenwood, IN (US);
Kimberly Pollard, Anderson, IN (US);
Dynaloy, LLC, Kingsport, TN (US);
Abstract
Improved dry stripper solutions for removing one, two or more photoresist layers from substrates are provided. The stripper solutions comprise dimethyl sulfoxide, a quaternary ammonium hydroxide, and an alkanolamine, a secondary solvent, and less than about 3 wt. % water. Methods for the preparation and use of the improved dry stripping solutions are additionally provided.