The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Jan. 06, 2012
Applicants:
Taigo Nakajima, Kyoto, JP;
Kunio Ueta, Kyoto, JP;
Kazutaka Taniguchi, Kyoto, JP;
Inventors:
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); H01L 21/68 (2006.01); H01L 21/67 (2006.01); G01N 21/84 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01); H01L 21/67288 (2013.01); H01L 22/12 (2013.01); G01N 21/8422 (2013.01); G01N 2021/8427 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A substrate inspection apparatus for detecting a condition of an EBR line at a substrate edge, comprising a turntable for rotating a substrate having a film coated thereon, a light irradiator and a photoelectric converter that receives specularly reflected light from the substrate and outputs a captured image signal. A two-dimensional image is generated by adding detection values of electrical signals corresponding to one radial scan from a center of the substrate for one turn of a rotator, and a changing point is judged using a judgment band set along one direction of the two-dimensional image.