The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 23, 2015
Filed:
Nov. 24, 2009
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Daniel Kraehmer, Essingen, DE;
Vladimir Kamenov, Essingen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Aksel Goehnermeier, Essingen-Lauterburg, DE;
Daniel Kraehmer, Essingen, DE;
Vladimir Kamenov, Essingen, DE;
Michael Totzeck, Schwaebisch Gmuend, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
A projection objective for applications in microlithography, a microlithography projection exposure apparatus with a projection objective, a microlithographic manufacturing method for microstructured components, and a component manufactured using such a manufacturing method are disclosed. The projection objective includes an optical component configured so that, during use of the projection objective, the optical component generates a stray light component in the exposure field of the projection objective which adapts a parameter of the projection objective to a parameter of a second projection objective. The parameter is the stray light component at the exposure field of the projection objective and/or a variation of the stray light component at the exposure field of the projection objective. The parameter of the second projection objective is a stray light component at an exposure field of the second projection objective and/or a variation of the stray light component at the exposure field of the second projection objective. The second projection objective is different from the projection objective.