The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Sep. 07, 2008
Applicants:
Artur Kolics, Dublin, CA (US);
Fritz Redeker, Fremont, CA (US);
Inventors:
Artur Kolics, Dublin, CA (US);
Fritz Redeker, Fremont, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/04 (2006.01); C11D 7/32 (2006.01); H01L 21/02 (2006.01); C09K 13/00 (2006.01); C11D 7/16 (2006.01); C11D 7/26 (2006.01); C11D 7/34 (2006.01); C11D 11/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02057 (2013.01); C09K 13/00 (2013.01); C11D 7/16 (2013.01); C11D 7/261 (2013.01); C11D 7/3281 (2013.01); C11D 7/34 (2013.01); C11D 11/0047 (2013.01);
Abstract
Presented is a cleaning solution according to one embodiment of the present invention that includes a corrosion inhibitor, a solubilizing agent, an oxygen scavenger, and a complexing agent also capable as a pH adjustor. Another embodiment of the present invention includes cleaning solutions that include a pH adjustor, an optional complexing agent, and a corrosion inhibitor. The cleaning solutions may have a solubilizing agent optionally present, may have a surfactant optionally present, and may have a dielectric etchant optionally present.