The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Oct. 17, 2012
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Jun Iwashita, Kawasaki, JP;
Kenri Konno, Kawasaki, JP;
Daisuke Kawana, Kawasaki, JP;
Tatsuya Fujii, Kawasaki, JP;
Kenta Suzuki, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including a base component containing a polymer (A1) having a structural unit (a5) containing a group represented by general formula (a5-0-1) or (a5-0-2), wherein the amount of the monomer that derives the structural unit (a5) is not more than 100 ppm relative to (A1). In the formulas, each of Qand Qrepresents single bond or divalent linking group, R, Rand Rrepresent organic groups, and Rand Rmay be bonded to each other to form a ring in combination with the sulfur atom, provided that —R—S(R)(R) has a total of only one aromatic ring or has no aromatic rings, Vrepresents a counter anion, Arepresents an organic group containing anion, and Mrepresents an organic cation having a valency of m, wherein m represents an integer of 1 to 3, provided that Mhas only one aromatic ring or has no aromatic rings.