The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2015
Filed:
Aug. 24, 2010
Applicants:
Gary J. Rosen, Manchester, MA (US);
Frank Sinclair, Quincy, MA (US);
Alexander Soskov, Danvers, MA (US);
James S. Buff, Brookline, NH (US);
Inventors:
Gary J. Rosen, Manchester, MA (US);
Frank Sinclair, Quincy, MA (US);
Alexander Soskov, Danvers, MA (US);
James S. Buff, Brookline, NH (US);
Assignee:
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B22D 46/00 (2006.01); B22D 21/00 (2006.01); G01B 7/06 (2006.01); B22D 2/00 (2006.01); C30B 11/00 (2006.01); B22D 11/12 (2006.01); B22D 11/14 (2006.01); C30B 15/00 (2006.01); C30B 29/06 (2006.01); C30B 35/00 (2006.01); C30B 29/64 (2006.01); C30B 29/08 (2006.01); C30B 29/40 (2006.01); C30B 29/36 (2006.01);
U.S. Cl.
CPC ...
C30B 11/00 (2013.01); C30B 29/64 (2013.01); C30B 29/08 (2013.01); C30B 29/406 (2013.01); C30B 29/36 (2013.01); Y10T 117/1088 (2015.01); Y10T 117/1068 (2015.01); Y10T 117/1044 (2015.01); Y10T 117/1032 (2015.01); Y10T 117/1048 (2015.01); Y10T 117/1004 (2015.01); Y10T 117/1008 (2015.01); B22D 11/1206 (2013.01); B22D 11/143 (2013.01); C30B 15/00 (2013.01); C30B 29/06 (2013.01); C30B 35/00 (2013.01); G01B 7/105 (2013.01); G01B 7/107 (2013.01);
Abstract
A sheet of a material is disposed in a melt of the material. The sheet is formed using a cooling plate in one instance. An exciting coil and sensing coil are positioned downstream of the cooling plate. The exciting coil and sensing coil use eddy currents to determine a thickness of the solid sheet on top of the melt.