The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Oct. 14, 2014
Disco Corporation, Tokyo, JP;
Chikara Aikawa, Tokyo, JP;
Kunimitsu Takahashi, Tokyo, JP;
Nobuyasu Kitahara, Tokyo, JP;
Seiji Fujiwara, Tokyo, JP;
Yoshiaki Yodo, Tokyo, JP;
Junichi Kuki, Tokyo, JP;
Disco Corporation, Tokyo, JP;
Abstract
A wafer processing method divides a wafer into a plurality of individual devices along a plurality of crossing division lines formed on the front side of the wafer. The method includes a functional layer removing step of applying a COlaser beam to the wafer along each division line with the spot of the COlaser beam, having a width corresponding to the width of each division line set on the upper surface of each division line, thereby removing a functional layer along each division line to form a groove along each division line where the functional layer has been removed, and a groove shaping and debris removing step of applying a laser beam having a wavelength in the ultraviolet region to the wafer along each groove, thereby removing debris sticking to the bottom surface of each groove and also shaping the side walls of each groove.