The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 09, 2015

Filed:

Mar. 15, 2013
Applicant:

Semiconductor Manufacturing International Corp., Shanghai, CN;

Inventors:

Deyuan Xiao, Shanghai, CN;

Emily Shu, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/16 (2006.01); H01L 29/49 (2006.01); H01L 29/786 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1606 (2013.01); H01L 29/4908 (2013.01); H01L 29/78603 (2013.01); H01L 29/78648 (2013.01); H01L 29/78654 (2013.01); H01L 29/78696 (2013.01); H01L 29/045 (2013.01);
Abstract

A method is provided for fabricating a transistor. The method includes providing a semiconductor substrate, and forming a metal layer on the semiconductor substrate. The method also includes forming a silicon layer having at least one layer of graphene-like silicon on the metal layer, and forming a metal oxide layer by oxidizing a portion of the metal layer underneath the silicon layer. Further, the method includes forming a source region and a drain region connecting with the silicon layer.


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Xiao, Deyuan. (2015). Transistors and fabrication method (U.S. Patent No. 9054021). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9054021

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