The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
Aug. 14, 2012
Mohan Mahadevan, Santa Clara, CA (US);
Govind Thattaisundaram, Milpitas, CA (US);
Ajay Gupta, San Jose, CA (US);
Chien-huei (Adam) Chen, San Jose, CA (US);
Jason Kirkwood, Mountain View, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Songnian Rong, San Jose, CA (US);
Ernesto Escorcia, Sunnyvale, CA (US);
Eugene Shifrin, Sunnyvale, CA (US);
Mohan Mahadevan, Santa Clara, CA (US);
Govind Thattaisundaram, Milpitas, CA (US);
Ajay Gupta, San Jose, CA (US);
Chien-Huei (Adam) Chen, San Jose, CA (US);
Jason Kirkwood, Mountain View, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Songnian Rong, San Jose, CA (US);
Ernesto Escorcia, Sunnyvale, CA (US);
Eugene Shifrin, Sunnyvale, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Methods and systems for determining inspection scenarios without input from a user are presented. Inspection scenarios include at least one acquisition mode, defect detection parameter values, and classification parameter values. In one example, a number of defect events are determined by a hot inspection of a wafer surface. The defect events are classified and attributes associated with each defect event are identified. The defect events are labeled with this information. Based on the identified attributes and classification, inspection scenarios are determined. The inspection scenarios are solutions in a mathematical space formed by the identified attributes. In some examples, a plurality of inspection scenarios are determined and a desired inspection scenario is selected from the plurality based on the number of defects of interest and the number of nuisance events captured by the selected inspection scenario.