The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2015
Filed:
May. 14, 2009
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Joost Jeroen Ottens, Veldhoven, NL;
Marcus Martinus Petrus Adrianus Vermeulen, Leende, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Joost Jeroen Ottens, Veldhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A support structure for supporting an exchangeable object in a lithographic exposure apparatus includes a first support structure part and a second support structure part, the first support structure part being arranged to support the object, and the second support structure part being arranged to, at least in part, support the first support structure part. At least one of the first support structure part and the second support structure part has an open-box structure. The first support structure part and the second support structure part are configured to be attached to one another in such a way that the first support structure part and the second support structure together form a closed-box structure.