The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2015
Filed:
Jul. 03, 2012
Hidong Kwak, San Jose, CA (US);
Ward Dixon, Livermore, CA (US);
Leonid Poslavsky, Belmont, CA (US);
Torsten R. Kaack, Los Altos, CA (US);
Hidong Kwak, San Jose, CA (US);
Ward Dixon, Livermore, CA (US);
Leonid Poslavsky, Belmont, CA (US);
Torsten R. Kaack, Los Altos, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
Ellipsometry systems and ellipsometry data collection methods with improved stabilities are disclosed. In accordance with the present disclosure, multiple predetermined, discrete analyzer angles are utilized to collect ellipsometry data for a single measurement, and data regression is performed based on the ellipsometry data collected at these predetermined, discrete analyzer angles. Utilizing multiple discrete analyzer angles for a single measurement improves the stability of the ellipsometry system.