The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 26, 2015
Filed:
May. 20, 2011
Scott Young, Soquel, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Ashok Kulkarni, San Jose, CA (US);
Scott Young, Soquel, CA (US);
Eliezer Rosengaus, Palo Alto, CA (US);
Ashok Kulkarni, San Jose, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The present invention may include an illumination source; a TDI sensor having a plurality of rows of TDI pixels, wherein each of the TDI pixels have a 1:1 aspect ratio; a multicolor filter contacted to the surface of the TDI sensor, wherein the multicolor filter has alternating sections of a first color filter, a second color filter, and at least a third color, wherein adjacent rows of TDI pixels are grouped in order to form a plurality of rows of integrated multicolor pixels; an objective having a first end positioned proximate to the specimen; a second lens configured to focus light from the image path onto the TDI sensor; and an anamorphic optics element configured to magnify an image of the one or more specimens such that the image is magnified by a factor of three along a direction orthogonal to an integrating direction of the TDI sensor.