The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 26, 2015

Filed:

May. 17, 2012
Applicants:

Cliff Bugge, Portland, OR (US);

Brandon Van Leer, Cornelius, OR (US);

Inventors:

Cliff Bugge, Portland, OR (US);

Brandon van Leer, Cornelius, OR (US);

Assignee:

FEI COMPANY, Hillsboro, OR (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04N 7/18 (2006.01); H01J 37/22 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01); G02B 21/00 (2006.01);
U.S. Cl.
CPC ...
H01J 37/222 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); H01J 2237/2813 (2013.01); G02B 21/002 (2013.01);
Abstract

A method of using a scanning microscope to rapidly form a digital image of an area. The method includes performing an initial set of scans to form a guide pixel set for the area and using the guide pixel set to identify regions representing structures of interest in the area. Then, performing additional scans of the regions representing structures of interest, to gather further data to further evaluate pixels in the regions, and not scanning elsewhere in the area.


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