The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Dec. 09, 2011
Kazunari Ishii, Yamanashi, JP;
Tetsuji Watanabe, Yamanashi, JP;
Shinya Koizumi, Yamanashi, JP;
Koichi Matsuzaki, Yamanashi, JP;
Kazunari Ishii, Yamanashi, JP;
Tetsuji Watanabe, Yamanashi, JP;
Shinya Koizumi, Yamanashi, JP;
Koichi Matsuzaki, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
In a method for thermal stabilization of a probe card, a probe card is adjusted to a prescribed temperature in a short time by making a heat source directly contact the probe card and is accurately determined whether the probe card is thermally stable. A heat transfer substrate is mounted on a mounting table. The temperature of the heat transfer substrate is adjusted through the mounting table. The mounting table is raised, and a plurality of probes is brought into contact with the heat transfer substrate at a prescribed target load. The contact load between the heat transfer substrate and the probes, which changes according to the thermal changes in the probe card, is detected. The mounting table is controlled vertically through a vertical drive mechanism such that the contact load becomes the target load until the probe card is thermally stable.