The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
May. 20, 2011
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Georgiy O. Vaschenko, San Diego, CA (US);
William Oldham, Orinda, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
William N. Partlo, Poway, CA (US);
Georgiy O. Vaschenko, San Diego, CA (US);
William Oldham, Orinda, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A filter is used in a target material supply apparatus and includes a sheet having a first flat surface and a second opposing flat surface, and a plurality of through holes. The first flat surface is in fluid communication with a reservoir that holds a target mixture that includes a target material and non-target particles. The through holes extend from the second flat surface and are fluidly coupled at the second flat surface to an orifice of a nozzle. The sheet has a surface area that is exposed to the target mixture, the exposed surface area being at least a factor of one hundred less than an exposed surface area of a sintered filter having an equivalent transverse extent to that of the sheet.