The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
Oct. 19, 2012
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Maarten Bischoff, Uden, NL;
Bernd Rieger, Delft, NL;
Assignee:
FEI Company, Hillsoboro, unknown;
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2006.01); H01J 37/21 (2006.01); H01J 37/22 (2006.01); H01J 37/153 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/22 (2013.01); G01N 23/20 (2013.01); H01J 37/153 (2013.01); H01J 37/20 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/1534 (2013.01); H01J 2237/216 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2802 (2013.01);
Abstract
The invention relates to a method for adjusting a Ccorrector in a STEM using a crystalline sample. The method comprises recording a through-focus series, converting the obtained images to Fourier space, thus forming a set of images alike diffraction images. By then determining the symmetry of the Fourier images, the corrector can be tuned for better symmetry, and the transfer limit can be determined by determining the maximum distance of the spots from the center. By repeatedly performing these steps, the corrector can be tuned to its optimum performance.