The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 12, 2015
Filed:
May. 09, 2013
Applicants:
Memc Electronic Materials, Inc., St. Peters, MO (US);
Kansas State University Research Foundation, Manhattan, KS (US);
Inventors:
Michael R. Seacrist, Lake St. Louis, MO (US);
Vikas Berry, Manhattan, KS (US);
Phong Tuan Nguyen, Wichita, KS (US);
Assignees:
SunEdision Semiconductor Limited (UEN201334164H), Singapore, SG;
Kansas State University Research Foundation, Manhattan, KS (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/331 (2006.01); H01L 21/8222 (2006.01); H01L 21/02 (2006.01); H01L 29/16 (2006.01); B82Y 40/00 (2011.01); B82Y 30/00 (2011.01);
U.S. Cl.
CPC ...
H01L 21/02376 (2013.01); H01L 29/1606 (2013.01); B82Y 40/00 (2013.01); H01L 21/0237 (2013.01); H01L 21/02381 (2013.01); H01L 21/02488 (2013.01); H01L 21/02491 (2013.01); H01L 21/02502 (2013.01); H01L 21/02527 (2013.01); H01L 21/0262 (2013.01); H01L 21/02458 (2013.01); B82Y 30/00 (2013.01);
Abstract
The invention generally related to a method for preparing a layer of graphene directly on the surface of a substrate, such as a semiconductor substrate. The layer of graphene may be formed in direct contact with the surface of the substrate, or an intervening layer of a material may be formed between the substrate surface and the graphene layer.