The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
May. 24, 2011
Richard A. Cooke, Framingham, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Julian Blake, Gloucester, MA (US);
David Suuronen, Newburyport, MA (US);
Richard A. Cooke, Framingham, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
Julian Blake, Gloucester, MA (US);
David Suuronen, Newburyport, MA (US);
Entegris, Inc., Eillerica, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
In accordance with an embodiment of the invention, there is provided an electrostatic chuck. The electrostatic chuck comprises an electrode, and a surface layer activated by a voltage in the electrode to form an electric charge to electrostatically clamp a substrate to the electrostatic chuck, the surface layer including a charge control layer comprising a surface resistivity of greater than about 10ohms per square.