The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 05, 2015
Filed:
Mar. 13, 2012
Tsuyoshi Moriya, Tokyo, JP;
Asao Yamashita, Miyagi, JP;
Tsuyoshi Moriya, Tokyo, JP;
Asao Yamashita, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Provided is a filtration filer with which a stable opening size during filtration is obtained, and which can be easily regenerated when clogged and used repeatedly. The filtration filter () comprises: a substrate stack wherein substrates () that have a through hole that penetrates from front to back are stacked; stoppers () that define the spacing between the substrates (); and pillars () with a larger thermal expansion coefficient than the stoppers (). The spacing between the substrates () at normal temperature is defined at least by the stoppers (), and the spacing when heated is defined by the thermally expanded pillars (). The gaps between the substrates () form the filtration surface that traps contaminants contained in the liquid that is being treated A.