The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Apr. 10, 2014
Nuflare Technology, Inc., Yokohama, JP;
Hideaki Hashimoto, Kanagawa, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
In accordance with one aspect of this invention, a pattern inspection method includes acquiring optical images regarding figure patterns arranged in each of frame regions, for each of the plurality of frame regions; measuring linewidth dimensions of the figure patterns, for each of the frame regions; operating an average value of each linewidth dimension shift between linewidth dimensions of figure patterns in a reference image corresponding to the frame region concerned and the linewidth dimensions of the figure patterns in the optical image, for each of the frame regions; extracting a specific frame from the frame regions by comparing the average value of the frame region concerned, with average values of frame regions around the frame region concerned, for each of the frame regions; and inspecting the specific frame for dimensional defects of linewidth dimensions.