The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Sep. 22, 2011
Jun Yamawaku, Nirasaki, JP;
Chishio Koshimizu, Nirasaki, JP;
Tatsuo Matsudo, Nirasaki, JP;
Kenji Nagai, Nirasaki, JP;
Jun Yamawaku, Nirasaki, JP;
Chishio Koshimizu, Nirasaki, JP;
Tatsuo Matsudo, Nirasaki, JP;
Kenji Nagai, Nirasaki, JP;
Tokyo Electron Limited, , JP;
Abstract
The temperature control system includes: a susceptor which allows an object to be processed to be held on a top surface thereof and includes a flow path, through which a temperature adjusting medium flows, formed therein; a temperature measuring unit which measures a temperature of the object to be processed held on the top surface of the susceptor; a first temperature adjusting unit which adjusts a temperature of the temperature adjusting medium flowing through the flow path; and a second temperature adjusting unit which is disposed between the susceptor and the first temperature adjusting unit, and adjusts a temperature of the temperature adjusting medium based on a result of the measurement of the temperature measuring unit.