The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Jul. 13, 2011
Chris G. M. DE Ridder, Almere, NL;
Klaas P. Boonstra, Almere, NL;
Theodorus G. M. Oosterlaken, Almere, NL;
Barend J. T. Ravenhorst, Almere, NL;
Chris G. M. de Ridder, Almere, NL;
Klaas P. Boonstra, Almere, NL;
Theodorus G. M. Oosterlaken, Almere, NL;
Barend J. T. Ravenhorst, Almere, NL;
ASM International N.V., Almere, NL;
Abstract
A semiconductor substrate processing apparatus (), comprising a substrate support assembly (), including a substrate support () defining an outer support surface () for supporting a substrate or substrate carrier () thereon, and a heater () comprising a heat dissipating portion () that is disposed within the substrate support () and that extends underneath and substantially parallel to the support surface (), said substrate support () being rotatably mounted around a rotation axis (L) that extends through said support surface (), such that the support surface () is rotatable relative to the heat dissipating portion () of the heater ().