The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 28, 2015
Filed:
Sep. 17, 2008
Richard L Sandstrom, San Diego, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Thomas Hoffmann, San Diego, CA (US);
Jason D Robinson, San Diego, CA (US);
Craig W Unick, San Diego, CA (US);
Richard L Sandstrom, San Diego, CA (US);
Daniel J. W. Brown, San Diego, CA (US);
Thomas Hoffmann, San Diego, CA (US);
Jason D Robinson, San Diego, CA (US);
Craig W Unick, San Diego, CA (US);
Cymer, LLC, San Diego, CA (US);
Abstract
An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.