The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Dec. 20, 2012
Hitachi High-technologies Corporation, Minato-ku, Tokyo, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A control device () for a charged particle beam device () tilts the irradiation axis of a primary electron beam () to the left, straight, or to the right via tilting coils () each time the primary electron beam () scans the surface of a sample () over a single scanning line. When the irradiation axis is changed, the focal point of the primary electron beam () is adjusted by a focal point-adjusting coil () based on the tilt of the irradiation axis in order to take a left-tilted observation image, a non-tilted observation image or a right-tilted observation image of the surface of a sample () for each scanning line. The left-tilted observation images, non-tilted observation images and right-tilted observation images for the scanning lines obtained up to this point are simultaneously displayed on the same display device (). In this way, focused non-tilted observation images and focused tilted observation images can be taken and displayed nearly simultaneously.