The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Aug. 14, 2014
Spansion Llc, Sunnyvale, CA (US);
Steven Avanzino, Cupertino, CA (US);
Tzu-Ning Fang, Palo Alto, CA (US);
Swaroop Kaza, Sunnyvale, CA (US);
Dong-Xiang Liao, Sunnyvale, CA (US);
Wai Lo, Palo Alto, CA (US);
Christie Marrian, San Jose, CA (US);
Sameer Haddad, San Jose, CA (US);
Spansion LLC, Sunnyvale, CA (US);
Abstract
In a method of fabricating a metal-insulator-metal (MIM) device, initially, a first electrode is provided. An oxide layer is provided on the first electrode, and a protective layer is provided on the oxide layer. An opening through the protective layer is provided to expose a portion of the oxide layer, and a portion of the first electrode underlying the exposed portion of the oxide layer is oxidized. A second electrode is provided in contact with the exposed portion of the oxide layer. In alternative embodiments, the initially provided oxide layer may be eliminated, and spacers of insulating material may be provided in the opening.