The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2015
Filed:
Mar. 04, 2011
Mitsutoshi Ashida, Nirasaki, JP;
Mitsutoshi Ashida, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A controllerof an automatic matching unit includes a first and a second matching control unitfor respectively variably controlling the electrostatic capacitances of a first and a second variable capacitorsthrough a first and a second stepping motorsuch that a measured absolute value ZMand a measured phase Zθof a load impedance obtained by an impedance measuring unitbecome close to a predetermined reference absolute value ZMand a predetermined reference phase Zθ, respectively; and a gain control unit. The gain control unitvariably controls a proportional gain of at least one of the first and the second matching unit based on current electrostatic capacitances NCand NCof the first and the second variable capacitorsobtained by a first and a second electrostatic capacitance monitoring unit, respectively.