The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Feb. 16, 2012
Hiroaki Shimizu, Kawasaki, JP;
Sho Abe, Kawasaki, JP;
Hideto Nito, Kawasaki, JP;
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Abstract
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid, a basic-compound component (C) and an acid-generator component (B) which generates acid upon exposure, the component (B) including a compound represented by formula (b1), and the component (C) including at least one compound represented by formulas (c1) to (c3) (wherein Zrepresents a ring skeleton-containing hydrocarbon group, Qrepresents a divalent linking group containing oxygen, Yrepresents a fluorinated alkylene group, Mrepresents an organic cation, Rrepresents a fluorinated alkyl group or a hydrocarbon group, Land Lrepresents a sulfonium or an iodonium, Zrepresents a hydrogen atom or a hydrocarbon group, Yrepresents a single bond or a divalent linking group containing no fluorine, Rrepresents an organic group, Yrepresents an alkylene group or an arylene group; and Rf represents a fluorine-containing hydrocarbon group).