logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8999631 B1

PDFFull Text
Date of Patent:
Apr. 07, 2015

Filed:

Sep. 12, 2011

Primer and pattern forming method for layer including block copolymer

Applicants:

Takahiro Senzaki, Kawasaki, JP;

Takahiro Dazai, Kawasaki, JP;

Ken Miyagi, Kawasaki, JP;

Shigenori Fujikawa, Fukuoka, JP;

Harumi Hayakawa, Wako, JP;

Mari Koizumi, Wako, JP;

Inventors:

Takahiro Senzaki, Kawasaki, JP;

Takahiro Dazai, Kawasaki, JP;

Ken Miyagi, Kawasaki, JP;

Shigenori Fujikawa, Fukuoka, JP;

Harumi Hayakawa, Wako, JP;

Mari Koizumi, Wako, JP;

Assignees:

Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;

Riken, Wako-shi, JP;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Cynthia Hamilton

Int. Cl.
CPC ...
G03F 7/11 (2006.01); G03F 7/20 (2006.01); G03F 7/26 (2006.01); C08L 53/00 (2006.01); C09D 161/06 (2006.01); G03F 7/00 (2006.01); C09D 125/14 (2006.01); G03F 7/075 (2006.01); C08K 5/42 (2006.01); C08K 5/45 (2006.01);
U.S. Cl.
CPC ...
G03F 7/11 (2013.01); G03F 7/265 (2013.01); C08L 53/00 (2013.01); C09D 161/06 (2013.01); G03F 7/00 (2013.01); G03F 7/20 (2013.01); C09D 125/14 (2013.01); G03F 7/0002 (2013.01); G03F 7/0752 (2013.01); Y10S 438/947 (2013.01); C08K 5/42 (2013.01); C08K 5/45 (2013.01);
Abstract

An undercoat agent usable in phase separation of a layer formed on a substrate, the layer containing a block copolymer having a plurality of polymers bonded, the undercoat agent including a resin component, and 20 mol % to 80 mol % of all the structural units of the resin component being a structural unit derived from an aromatic ring-containing monomer; and a method of forming a pattern of a layer containing a block copolymer, the method including: step (1) coating the undercoat agent on a substrate (), thereby forming a layer () composed of the undercoat agent, step (2) forming a layer () containing a block copolymer having a plurality of polymers bonded on the surface of the layer () composed of the undercoat agent, and subjecting the layer () containing the block copolymer to phase separation, and step (3) selectively removing a phase () of at least one polymer of the plurality of copolymers constituting the block copolymer from the layer () containing the block copolymer.

Find Patent Forward Citations

Loading…