The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2015

Filed:

Aug. 27, 2012
Applicants:

El Mehdi Bazizi, Dresden, DE;

Francis Benistant, Singapore, SG;

Inventors:

El Mehdi Bazizi, Dresden, DE;

Francis Benistant, Singapore, SG;

Assignee:

GLOBALFOUNDRIES, Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/10 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/6659 (2013.01); H01L 29/105 (2013.01); H01L 29/1054 (2013.01); H01L 29/7836 (2013.01);
Abstract

Semiconductor devices and methods of forming semiconductor devices are provided herein. In an embodiment, a semiconductor device includes a semiconductor substrate. A source region and a drain region are disposed in the semiconductor substrate. A channel region is defined in the semiconductor substrate between the source region and the drain region. A gate dielectric layer overlies the channel region of the semiconductor substrate, and a gate electrode overlies the gate dielectric layer. The channel region includes a first carbon-containing layer, a doped layer overlying the first carbon-containing layer, a second carbon-containing layer overlying the doped layer, and an intrinsic semiconductor layer overlying the second carbon-containing layer. The doped layer includes a dopant that is different than carbon.


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