The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2015

Filed:

Jul. 30, 2013
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;

Inventors:

Hao-Yi Tsai, Hsin-Chu, TW;

Chia-Lun Tsai, Hsin-Chu, TW;

Shang-Yun Hou, Jubei, TW;

Shin-Puu Jeng, Hsin-Chu, TW;

Shih-Hsun Hsu, Hsin-Chu, TW;

Wei-Ti Hsu, Keelung, TW;

Lin-Ko Feng, Kaohsiung, TW;

Chun-Jen Chen, Renwu Township, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 21/78 (2006.01); H01L 21/786 (2006.01); H01L 21/782 (2006.01); H01L 21/784 (2006.01);
U.S. Cl.
CPC ...
H01L 21/78 (2013.01); H01L 21/786 (2013.01); H01L 21/782 (2013.01); H01L 21/784 (2013.01); H01L 22/34 (2013.01); H01L 22/10 (2013.01);
Abstract

A semiconductor wafer structure includes a plurality of dies, a first scribe line extending along a first direction, a second scribe line extending along a second direction and intersecting the first scribe line, wherein the first and the second scribe lines have an intersection region. A test line is formed in the scribe line, wherein the test line crosses the intersection region. Test pads are formed in the test line and only outside a free region defined substantially in the intersection region.


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