The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Sep. 18, 2012
Air Products and Chemicals, Inc., Allentown, PA (US);
Manchao Xiao, San Diego, CA (US);
Xinjian Lei, Vista, CA (US);
Mark Leonard O'Neill, San Marcos, CA (US);
Bing Han, Beijing, CN;
Ronald Martin Pearlstein, San Marcos, CA (US);
Haripin Chandra, Vista, CA (US);
Heather Regina Bowen, Vista, CA (US);
Agnes Derecskei-Kovacs, Macungie, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
Described herein are precursors and methods of forming films. In one aspect, there is provided a precursor having Formula I:XRHSi(NRR)  Iwherein X is selected from Cl, Br, I; Ris selected from linear or branched C-Calkyl group, a C-Calkenyl group, a C-Calkynyl group, a C-Ccyclic alkyl, and a C-Caryl group; Ris selected from a linear or branched C-Calkyl, a C-Calkenyl group, a C-Calkynyl group, a C-Ccyclic alkyl group, and a C-Caryl group; Ris selected from a branched C-Calkyl group, a C-Calkenyl group, a C-Calkynyl group, a C-Ccyclic alkyl group, and a C-Caryl group; m is 1 or 2; n is 0, 1, or 2; p is 0, 1 or 2; and m+n+p is less than 4, wherein Rand Rare linked or not linked to form a ring.