The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Jul. 29, 2010
Katsutoshi Hoshino, Yamagata, JP;
Masahide Kato, Yamagata, JP;
Yasuhiro Umetsu, Yamagata, JP;
Kosuke Imafuku, Nirasaki, JP;
Katsutoshi Hoshino, Yamagata, JP;
Masahide Kato, Yamagata, JP;
Yasuhiro Umetsu, Yamagata, JP;
Kosuke Imafuku, Nirasaki, JP;
Techno Quartz Inc., Tokyo, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method is provided of refurbishing a quartz glass component which has been contaminated and eroded due to continuous use in a plasma process apparatus for semiconductor manufacturing. In the method, a surface deposit on the quartz glass component is removed by an appropriate cleaning method which is determined depending on the contamination status, and presence or absence of residual deposit on the cleaned component is carefully inspected through irradiating with light of a predetermined wavelength to cause fluorescence effect. Then the eroded portion of the quartz glass component is restored to the original state by flame treatment and precision machining. As a result, the refurbishment method can increase the mechanical strength of the quartz glass component, enhance the productivity and yield ratio through efficient use of the remaining materials of the quartz glass.