The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Jun. 13, 2008
Johannes Käppeler, Würselen, DE;
Adam Boyd, Kelmis, BE;
Victor Saywell, Bury St. Edmunds, GB;
Jan Mulder, Eindhoven, NL;
Olivier Feron, Hsinchu, TW;
Johannes Käppeler, Würselen, DE;
Adam Boyd, Kelmis, BE;
Victor Saywell, Bury St. Edmunds, GB;
Jan Mulder, Eindhoven, NL;
Olivier Feron, Hsinchu, TW;
Aixtron Inc., Sunnyvale, CA (US);
Abstract
The invention relates to a device for coating substrates having a process chamber () disposed in a reactor housing and a two-part, substantially cup-shaped susceptor () disposed therein, forming an upper susceptor part () with the cup floor thereof having a flat plate (') and a lower susceptor part () with the cup side walls thereof, the outer side () of the plate (′) of the upper susceptor part () facing upwards toward the process chamber () and forming a contact surface for at least one substrate, the upper susceptor part () contacting a front edge (″) of the lower susceptor part () at the edge of said upper susceptor part (), the lower susceptor part () being supported by a susceptor carrier (), and heating zones (A, B, C) for heating the upper susceptor part () being disposed below the plate (′). An advantageous refinement of the invention proposes that the upper susceptor part () be removable from the process chamber () separately from the lower susceptor part (), and the joint () between the edge of the upper susceptor part () and the front edge (″) of the lower susceptor part () be formed as a heat conduction barrier.