The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Mar. 10, 2011
Applicants:
Roland Pieter Stolk, Sprang-Capelle, NL;
Paul Van Der Veen, Waalre, NL;
Inventors:
Roland Pieter Stolk, Sprang-Capelle, NL;
Paul Van Der Veen, Waalre, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/68 (2006.01); G03F 7/20 (2006.01); G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03B 27/54 (2006.01); G03B 27/72 (2006.01); G03B 27/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7085 (2013.01);
Abstract
A detector to measure a property of radiation is disclosed. The detector comprises first and second luminescent uniaxial crystals each having an optic axis, the optic axis of the first uniaxial crystal being arranged such that it is substantially perpendicular to the optic axis of the second uniaxial crystal.