The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 03, 2015
Filed:
Nov. 04, 2011
Applicants:
Ken Maruyama, Tokyo, JP;
Kota Nishino, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Hirokazu Sakakibara, Tokyo, JP;
Inventors:
Ken Maruyama, Tokyo, JP;
Kota Nishino, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Hirokazu Sakakibara, Tokyo, JP;
Assignee:
JSR Corporation, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/039 (2006.01); C07C 65/10 (2006.01);
U.S. Cl.
CPC ...
C07C 65/10 (2013.01); G03F 7/0045 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); Y10S 430/122 (2013.01); Y10S 430/126 (2013.01);
Abstract
A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, and a compound shown by the following general formula (1). wherein Zrepresents a monovalent anion shown by a general formula (2), Mrepresents a monovalent onium cation, Rrepresents a linear or branched alkyl group having 1 to 12 carbon atoms substituted or unsubstantiated with a fluorine atom, or a linear or branched alkoxy group having 1 to 12 carbon atoms, and n is 1 or 2.