The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Sep. 19, 2011
Damian Fiolka, Oberkochen, DE;
Wilfried Clauss, Tuebingen, DE;
Damian Fiolka, Oberkochen, DE;
Wilfried Clauss, Tuebingen, DE;
Carl Zeiss SMT GmbH, Oberkochen, DE;
Abstract
An optical assembly has at least one mirror with a mirror body. The latter is carried by a support body, which has a first support body portion and a second support body portion. An at least thermally separating region is arranged between the two support body portions. At least one surface portion of at least one of the support body portions or of a body thermally coupled thereto is modified in such a way that a thermal emission coefficient εof the modified surface portion differs from a thermal emission coefficient εof the unmodified surface portion by at least 10%. The result is an optical assembly, in which an improved thermal stability is achieved by the predetermining of the thermal emission coefficients.