The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Feb. 17, 2012
Griselda Bonilla, Fishkill, NY (US);
Kaushik Chanda, Santa Clara, CA (US);
Samuel S. Choi, Beacon, NY (US);
Ronald G. Filippi, Wappingers Falls, NY (US);
Stephan Grunow, Poughkeepsie, NY (US);
Naftali E. Lustig, Croton on Hudson, NY (US);
Andrew H. Simon, Fishkill, NY (US);
Junjing Bao, Fishkill, NY (US);
Griselda Bonilla, Fishkill, NY (US);
Kaushik Chanda, Santa Clara, CA (US);
Samuel S. Choi, Beacon, NY (US);
Ronald G. Filippi, Wappingers Falls, NY (US);
Stephan Grunow, Poughkeepsie, NY (US);
Naftali E. Lustig, Croton on Hudson, NY (US);
Andrew H. Simon, Fishkill, NY (US);
Junjing Bao, Fishkill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Structure providing more reliable fuse blow location, and method of making the same. A vertical metal fuse blow structure has, prior to fuse blow, an intentionally damaged portion of the fuse conductor. The damaged portion helps the fuse blow in a known location, thereby decreasing the resistance variability in post-blow circuits. At the same time, prior to fuse blow, the fuse structure is able to operate normally. The damaged portion of the fuse conductor is made by forming an opening in a cap layer above a portion of the fuse conductor, and etching the fuse conductor. Preferably, the opening is aligned such that the damaged portion is on the top corner of the fuse conductor. A cavity can be formed in the insulator adjacent to the damaged fuse conductor. The damaged fuse structure having a cavity can be easily incorporated in a process of making integrated circuits having air gaps.