The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2015
Filed:
Nov. 07, 2011
Applicants:
Junichiro Yoshioka, Kanagawa, JP;
Yoshitaka Mukaiyama, Kanagawa, JP;
Inventors:
Junichiro Yoshioka, Kanagawa, JP;
Yoshitaka Mukaiyama, Kanagawa, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C25D 17/00 (2006.01); H01L 21/687 (2006.01); C25D 17/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68721 (2013.01); C25D 17/06 (2013.01); C25D 17/001 (2013.01);
Abstract
A semiconductor wafer holder includes first and second holding members between which a semiconductor wafer is held. The second holding member includes a second conductive element placed in contact with a first conductive element of the first holding member and the semiconductor wafer. A ring clamp is used to press the second holding member against the first holding member for holding of the semiconductor wafer.