The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Jul. 26, 2012
Ming Zhang, Beijing, CN;
Yu Zhu, Beijing, CN;
Zhao Liu, Beijing, CN;
Jinchun HU, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Kaiming Yang, Beijing, CN;
Wensheng Yin, Beijing, CN;
Haihua Mu, Beijing, CN;
Ming Zhang, Beijing, CN;
Yu Zhu, Beijing, CN;
Zhao Liu, Beijing, CN;
Jinchun Hu, Beijing, CN;
Dengfeng Xu, Beijing, CN;
Kaiming Yang, Beijing, CN;
Wensheng Yin, Beijing, CN;
Haihua Mu, Beijing, CN;
Tsinghua University, Beijing, CN;
Abstract
A two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine. The system comprises mainly a semiconductor laser, an optical fiber collimator, optical fibers, and, an optical fiber splitter, filter plates, and, three PSD sensors, and, and a signal processing system. Laser emitted by the semiconductor laseris irradiated onto the optical fiber collimator, then transmitted respectively via three paths, and received by the PSD sensors, andafter having background light filtered out by the filter plates, and, while the positions of laser spots on the three PSD sensors, andare processed by the signal processing system to acquire the position and orientation.