The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 17, 2015
Filed:
Jul. 15, 2011
Applicants:
Marcel Beckers, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Ferdy Migchelbrink, Amersfoort, NL;
Inventors:
Marcel Beckers, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Eindhoven, NL;
Nicolaas Ten Kate, Almkerk, NL;
Ferdy Migchelbrink, Amersfoort, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70341 (2013.01);
Abstract
A protrusion is provided on a barrier member which at least partly confines a liquid between a projection system and a substrate. The protrusion is closer to the projection system than other parts of the barrier member to promote a meniscus of liquid to adhere between the protrusion and the projection system.