The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 17, 2015

Filed:

Sep. 14, 2012
Applicants:

Toshiyuki Yoshikawa, Ota-Ku, JP;

Hironari Ohkubo, Ota-Ku, JP;

Noboru Takeda, Ota-Ku, JP;

Inventors:

Toshiyuki Yoshikawa, Ota-Ku, JP;

Hironari Ohkubo, Ota-Ku, JP;

Noboru Takeda, Ota-Ku, JP;

Assignee:

Disco Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/304 (2006.01); B23K 26/00 (2014.01); B23K 26/04 (2014.01); B23K 26/40 (2014.01);
U.S. Cl.
CPC ...
B23K 26/048 (2013.01); B23K 26/0021 (2013.01); B23K 26/0042 (2013.01); H01L 21/3043 (2013.01); H01L 21/30 (2013.01); B23K 26/00 (2013.01); B23K 26/0039 (2013.01); H01L 21/304 (2013.01); B23K 26/4075 (2013.01); H01L 2221/00 (2013.01);
Abstract

A method of detecting a condensing spot position in a laser beam processing apparatus, including: a detection position setting step of setting a plurality of Z-axis directional positions in a range from a starting point to an ending point of detection positions into which the condenser is positioned; a laser beam processed groove forming step of sequentially positioning the condenser into the detection positions in the range from the starting point to the ending point, performing a predetermined interval indexing feeding by operating indexing feeding means each time the detection position for the condenser is changed, and forming a laser beam processed groove of a predetermined length in the plate-shaped body at each of the detection positions for the condenser; and a laser beam processed groove imaging step of imaging the laser beam processed grooves formed in the plate-shaped body by imaging means.


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