The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Aug. 03, 2012
Albertus Aemillius Seyno Sluijterman, Eindhoven, NL;
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Patrick David Vogelsang, Eindhoven, NL;
Johannes Adrianus Carolus Cooijmans, Den Dungen, NL;
Albertus Aemillius Seyno Sluijterman, Eindhoven, NL;
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Patrick David Vogelsang, Eindhoven, NL;
Johannes Adrianus Carolus Cooijmans, Den Dungen, NL;
FEI Company, Hillsboro, OR (US);
Abstract
The invention relates to a charged particle detector system comprising a conversion plate () to convert incoming radiation to secondary electrons. These secondary electrons are then detected by a secondary electron detector (), thereby providing information of the incoming radiation. Often this information is limited to, in first approximation, the flux of incoming radiation. In the case of, for example, backscattered electrons this is the current of the incoming backscattered electrons. The invention proposes to form the conversion plate as, for example, an energy dependent detector, for example a photodiode to detect electrons, so that the detector system simultaneously provides information of, for example, current (S) and mean energy (S) of the incoming radiation. The detector system is especially suited for use in a SEM or a DualBeam apparatus.