The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 10, 2015
Filed:
Oct. 14, 2010
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Xinjian Lei, Vista, CA (US);
Hansong Cheng, Singapore, SG;
Daniel P. Spence, Carlsbad, CA (US);
Moo-sung Kim, Sungnam, KR;
Sergei Vladimirovich Ivanov, Schnecksville, PA (US);
Xinjian Lei, Vista, CA (US);
Hansong Cheng, Singapore, SG;
Daniel P. Spence, Carlsbad, CA (US);
Moo-Sung Kim, Sungnam, KR;
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
The present invention is related to a family of Group 4 metal precursors represented by the formula:M(OR)(RC(O)C(R)C(O)OR)wherein M is a Group 4 metals of Ti, Zr, or Hf; wherein Ris selected from the group consisting of a linear or branched Calkyl and a Caryl, preferably methyl, ethyl or n-propyl; Ris selected from the group consisting of branched Calkyls, preferably iso-propyl, tert-butyl, sec-butyl, iso-butyl, or tert-amyl and a Caryl; Ris selected from the group consisting of hydrogen, Calkyls, and a Caryl, preferably hydrogen. In a preferred embodiment of this invention, the precursor is a liquid or a solid with a melting point below 60° C.