The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 03, 2015

Filed:

Mar. 25, 2010
Applicant:

Jarmo Maula, Espoo, FI;

Inventor:

Jarmo Maula, Espoo, FI;

Assignee:

Beneq Oy, Vantaa, FI;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); B05D 7/00 (2006.01); C23C 16/455 (2006.01); B01J 2/00 (2006.01); C23C 16/40 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45551 (2013.01); B01J 2/006 (2013.01); C23C 16/403 (2013.01); Y02T 50/67 (2013.01);
Abstract

The invention relates to a method and an apparatus for coating one or more objects () by exposing an object () to alternately repeating surface reactions of two or more gaseous precursors. The apparatus comprises a reaction chamber (), means for forming at least one distinct precursor region inside the reaction chamber, and means for causing translational, essentially mechanically unsupported and unsuspended, motion of an object () inside the reaction chamber, relative to the reaction chamber, for bringing the surface of the object () into contact with a gaseous precursor, the means for causing the translational motion comprising means for moving the object () essentially through the at least one distinct precursor region inside the reaction chamber.


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