The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2015
Filed:
Dec. 03, 2008
Applicants:
Xiaoming LU, Cedar Park, TX (US);
Philip D. Schumaker, Austin, TX (US);
Inventors:
Xiaoming Lu, Cedar Park, TX (US);
Philip D. Schumaker, Austin, TX (US);
Assignees:
Canon Nanotechnologies, Inc., Austin, TX (US);
Molecular Imprints, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B29C 43/58 (2006.01); B29C 43/00 (2006.01); B82Y 10/00 (2011.01); G03F 7/00 (2006.01); B82Y 40/00 (2011.01); B29C 43/02 (2006.01);
U.S. Cl.
CPC ...
B29C 43/58 (2013.01); B29C 2043/5808 (2013.01); B29C 2043/5841 (2013.01); B29C 2043/5833 (2013.01); B29C 43/003 (2013.01); B29C 2043/025 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01);
Abstract
Systems and methods for controlling velocity of a contact line and height profile between a template and a substrate during imprinting of polymerizable material are described.